Food is an important energy source for our survival. However, the Centers for Disease Control and Prevention estimates that every year about 76 million people in the United States become ill from pathogens in food. Of these, up to 5,000 die. Thus, pathogenic bacteria have threatened our health and even life. Therefore, the detection and precaution of contamination by pathogenic bacteria is very important issue. Conventional method for detection of pathogenic bacteria has used culture in the selective media and characterization using identification kit. Because this method takes 3-4 days, precaution of food poisoning is impossible. To overcome this time limits, the rapid detection method using polymerize chain reaction (PCR) or enzyme linked immunosorbent assay (ELSIA) have developed. Although precaution is possible because these methods take several hours, these methods have the limitation of high-throughput analysis for precise and simultaneous detection. Here, DNA microarray is rapid, precise and high-throughput methods. This technology makes possible to get the data thousand to million experiments by an experiment of DNA microarray. Here, we checked double specific capture probes and quantitative analysis of combinatorial oligonucleotide microarray for ten pathogenic bacteria detection using 16S rDNA as detection principle. In spite of nonspecific binding, the combinatorial oligonucleotide microarray discriminated the subtype of pathogenic bacteria. Nowadays, we focused other detection principles for DNA probe, quantitative analysis and non-labeling detection using other detection system like microcantilever.